摘要
纳米金刚石膜的制备、表征和应用研究已经成为CVD金刚石膜研究领域的一个新的热点 .文章重点介绍了Gruen等人在贫氢和无氢环境中制备纳米金刚石膜的开创性工作 ,并和在富氢气氛中制备的纳米金刚石膜进行了对比评述 .对纳米金刚石膜的表征技术和应用前景进行了讨论 .
The preparation, characterization and application of nanocrystalline diamond films have become a new 'hot point' in the development of diamond films prepared by chemical vapor deposition. A review is presented of the pioneering works of Gruen et al. on nano-diamond film preparation in a hydrogen depleted environment, and comparisons are made with nano-diamond films deposited in a hydrogen-rich environment. Potential applications of these films are discussed.
出处
《物理》
CAS
北大核心
2003年第6期383-390,共8页
Physics
