含氟聚酰亚胺及其在微电子工业中的研究进展 Ⅰ 含氟单体及聚酰亚胺的合成

Fluorinated Polyimides and the Applications in Microelectronics Industry Ⅰ.Synthesis of Fluorinated Monomers and Polyimides

综述了近年来国内外在含氟聚酰亚胺 (PI)研究及应用领域中的最新进展情况。主要从含氟二胺单体、二酐单体及含氟聚酰亚胺在合成方面的研究进展情况进行了详细的综述。重点阐述了中国科学院化学研究所 30 5组近几年在这方面的研究进展情况 ,并指出为了推动含氟聚酰亚胺这类具有优良综合性能的功能材料在工业上的广泛应用 。

Fluorinated polyimides have been widely used in many high technical fields for the excellent thermal properties, electrical properties and mechanical properties. In recent years, with the development of microelectronics industry, fluorinated polyimides are gaining increasing attention in passivation and packaging applications. In the article, the latest research and application development of fluorinated polyimides have been summarized. The synthesis progress of fluorinated diamine and dianhydride monomers and polyimides, especially the corresponding works of Institute of Chemistry were discussed in detail. In order to promote the development of fluorinated polyimides, the new types of fluorinated monomers must be research detailedly first.