多弧离子镀Ti(C,N)/TiN多元多层膜研究

Depositing of Ti(C,N)/TiN Multi-Element-Layer Film on Aluminum Alloy Substrate by Multi\|Arc Ion Plating

在LF6防锈铝的基体上采用多弧离子镀技术沉积了Ti(C,N)/TiN/Ti(C,N)/TiN/Ti(C,N)/TiN六层多元多层膜,并对其组织结构与性能进行了研究。结果表明:多元多层膜表面膜层均匀,未出现龟裂现象;膜与基体之间形成了纳米级厚度的Al3Ti新相层,说明膜与基体间的结合存在化学键合,结合强度良好,划痕临界载荷达79N。显微硬度达HV0.11911.0,与基体相比,其表面显微硬度提高了近20倍,耐磨性提高了10倍以上,但摩擦因数较高(μ=0.66),粘着对偶件磨损,使对偶件磨损较严重。

Ti(C,N)/TiN/Ti(C,N)/TiN/Ti(C,N)/TiN six\|layer film was deposited on LF6 substrate by multi\|arc ion plating, and its microstructure and properties were investigated. The results indicated that the surface of multi\|element\|layer film was even without map cracking. A new nano\|thickness Al\-3Ti was formed between the film and substrate, which proved that there exited chemical bond between them. The average critical load of film was 79N, and the microhardness was HV0.11911.0 that was 21 times of LF6 substrate. The wear\|resistance of film was 11 times of LF6 substrate. But the friction coefficient of film was 0.66 that was higher than the substrate and resulted in the severe wear of counter\|object.