摘要
由Talyrond 3型圆度仪、精密分度转台和IBM-PC微机组成了计算机辅助纳米级圆度测量系统,它采用多步法误差分离技术,将圆度仪的测量精度由原来的0.025μm提高到0.002μm。讨论了多步法的原理、方法误差能及分度转台设计中的几个问题。
A computer-aided nanometer roundness measurement system has been constructed which consists of a Talyrond-Type 3 roundness measuring instrument,a precision indexing table and an IBM-PC microcomputer.By using multi-step error separation technique,the measuring accuracy of the instrument has been improved from original 0.025μm to 0.002μm.The principle and method error of the multi-step method and some design problems of the indexing table are also discussed.
出处
《计量学报》
CSCD
1992年第3期170-175,共6页
Acta Metrologica Sinica
基金
国家自然科学基金
