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微粒静电搬运的高压驱动电路设计

Design of High Voltage Driving Circuit for Electrostatic Transportation of Micro Particles
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摘要 为了实现用不断变化的行波产生的静电力对微小粒子进行搬运操作,设计并制作了所需要的高压驱动电路。此电路主要由直流高压产生电路、用大功率CMOS管K1317组成稳压跟随电路以及电压调节电路组成。可承受±1 kV以上高压.造价低廉,并能使电压在士600 V到±1 200V之间进行调节。 To realize the transportation manipulation of micro particles by the electrostatic force caused by the continuously changing traveling wave, the high voltage driving circuit is designed and developed. This circuit is mostly composed of DC high voltage circuit, voltage tracing circuit which is formed by the high-power CMOS K1317 and voltage adjusting circuit. It can withstand the high voltage more than ?1 kV and can adjust voltage from±500 V to±1 200 V with low cost.
作者 刘震 冯志华
出处 《高电压技术》 EI CAS CSCD 北大核心 2003年第6期9-11,共3页 High Voltage Engineering
关键词 高压驱动电路 设计 微粒静电搬运设备 操作执行装置 高电压技术 transportation of micro particles high voltage circuit K1317
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参考文献4

  • 1Moesner F M, Higuchi T. Electrostatic devices for particle micro-handling [A]. Conference record of IAS'95[C]. Orlando, USA:IEEE, 1995:1302~1309.
  • 2Jones T B. Electro mechanics of particles[M]. Cambridge, UK: Cambridge University Press, 1995.
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  • 4Desai A, Lee S W, Tai Y C. A MEMS electrostatic particle transportation system[A]. The eleventh annual international workshop on micro electro mechanical systems[C]. Heidelberg, Germany:IEEE, 1998.121~126.

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