相变前后VO_2薄膜光学性质的研究

Research on Optical Property of Phase Transition VO_2 Films

测量了玻璃、熔融石英及蓝宝石衬底上VO2 薄膜变温过程的红外透过率谱 ,对样品相变前后的光学性质进行了研究。特定温度下VO2 薄膜发生相变 ,其光学性质随之发生突变。不同衬底、不同制作工艺影响相变发生的温度以及相变前后光学性质的变化量。蓝宝石衬底上磁控溅射所得的VO2 膜 5 μm处透过率的减小量ΔT为 70 % ,相对变化ΔT TRT为 94 % ,玻璃衬底上磁控溅射所得的VO2 膜 2 5 μm处ΔT =6 4 2 % ,而ΔT TRT高达 98% ,接近于 1。

Optical transmission spectra of VG films on glass, fused silica, and sapphire were recorded and analyzed during heating process. Thermally induced phase transition of VO2 films occurred at a certain temperature, associated with abrupt changes in optical properties. The transition temperature and the contrast of the optical properties depended on the substrate and the deposit method used. The change in transmittance AT at 5 mum of VO2 films deposited on sapphire by RF magnetron sputtering was 70%, and the corresponding relative change DeltaT/T-RT was 94%. For the VO2 films deposited on glass by RF magnetron sputtering, AT at 2.5 mum was 64.2%, and DeltaT/T-RT was as high as 98%.