摘要
阐述了激光扫描声学显微镜 ( SLAM)的结构、工作原理 ,以及激光扫描声学显微镜的实际应用 ,结合电子科技大学光电声信息处理研究中心研制成功的 SL AM说明这种新型无损检测设备具有的一些特殊功能 ,在电子、复合材料。
This article introduces the basic structure and the working principle of the scanning laser acoustic microscope (SLAM).Taking the scanning laser acoustic microscope for example ,this article also describes some special functions of this new type of equipment and points out its broad application prospects in the fields of electronics, compound materials and biomedicine science.
出处
《光电子技术》
CAS
2003年第2期113-116,共4页
Optoelectronic Technology
