溅射Au对SnO_2/Fe_2O_3薄膜气敏特性的影响

Influence of Au-sputtering on gas-sensing properties of SnO_2/Fe_2O_3 film

通过直流溅射Au对PCVD方法制备的SnO2/Fe2O3双层薄膜的SnO2表面进行了修饰,并对修饰后的Au SnO2/Fe2O3薄膜的气敏特性进行了观测。结果表明,Au的催化作用使Au SnO2/Fe2O3薄膜气敏器件对CO,H2,C2H5OH等气体的灵敏度增大2～3倍,相应于最大灵敏度的工作温度均降低约60℃。这显示直流溅射Au是改善SnO2/Fe2O3双层薄膜气敏性能的一种有效手段。

The SnO2 surfaces of SnO2/Fe2O3 doublelay er film with a plasma chemical vapor deposition (PCVD) were modified by dcsputte ring Au particles.The gassensing properties for the modified AuSnO2/Fe2O 3 were measured.It is found that due to the catalytic action of Au the sensiti vities of the AuSnO2/Fe2O3 on gas CO,H2 and C2H5OH increase by a f actor of 3～4,and that the temperatures for the maximum sensitivity are about 60 ?℃ lower than before modified.This shows that dcsputtering Au is an effectiv e surface modification method to improve gassensing properties of the SnO2/F e2O3.