电容式微机械加速度计测量范围上限设计

Design of upper limit of measurement range on capacitive micromachined acceler ometer

测量范围上限设计一直是高gn值微惯性引信研制的一个难题,对差动电容式微加速度计各参数对量程的本质影响及其相互关系进行了研究,理论分析和计算机仿真结果表明:按同一比例尽量减小封装间隙和电极面积,使得受限于临界偏压的外加偏压取值刚好能提供需要的量程,同时使用质量块减薄和打孔并用的方法来提高最大量程,所设计出的加速度计可具有70gn以上量程。

Design of upper limit of measurement range is alwa ys a difficult problem in the development of micro inertial fuze with high gn value.The essential influences of the parameters of diffe rential capacitive microaccelerometer on the measurement and the mutual relati ons are studied.The results of theoretical analysis and computer simulation show : the encapsulation gap and the electrode area should be as possible as reduced by the same proportion,the applied bias voltage value restricted to the critical voltage should just meet the needs of the measurement,and the maximum measureme nt range is increased by the reduction of thickness and the holes in the sensiti ve mass,so measurement range of the designed accelerometer will be higher than 70?gn.