摘要
提出了一种处理石英微天平 ( quartzcrystalmicrobalance,QCM )振动耦合问题的新方法 .用ANSYS6.0有限元软件直接对机电耦合场进行三维有限元分析 ,从而避免了一般解析和半解析分析中对控制方程的简化 .通过对全电极晶片的振动分析 ,验证了计算的有效性 ,并找到了较好的单元尺寸比 .对于部分电极晶片 ,分析了电极尺寸和电极区的等效厚度对有限谐振元振动特性的影响 .根据本文的分析结果 ,提出了一些多通道石英微天平 (MQCM )
The coupled vibration of QCM is analyzed with a new method, which uses the 3D software of ANSYS 6.0 to analyze directly the coupled phenomenon of the structural and electric fields. This analysis avoids the over simplification of the control equation in the normal analytic or semi analytic analyses. Through the analysis of a fully electroded crystal plate, it is found that the present method is effective and an optimal scale is discovered. For partially electroded crystal plate, the influences of scale of electrode and equivalent thickness of electroded region on vibrations characteristics of finite resonator are analyzed. Finally some suggestions are given on the improvement of the design of MQCM.
基金
中科院"百人计划"项目资助
关键词
MQCM
有限元
能陷
有限谐振元
等效厚度
multichannel quartz crystal microbalance (MQCM)
finite element
energy entrapping
finite resonator
equivalent thickness
