期刊文献+

不同注F剂量与CMOS运放电路辐照损伤的相关性 被引量:2

Relativity of Radiation Damage in Fluorinated CMOS Operational Amplifiers
下载PDF
导出
摘要 在不同注 F剂量条件下 ,对 P沟和 N沟两种不同差分对输入 CMOS运放电路的电离辐照响应进行了研究 .分析比较了注 F和未注 F运放电路电离辐照响应之间的差异 .结果表明 ,在栅场介质注入适量的 F,可有效抑制辐照感生的氧化物电荷尤其是界面态的增长 ,从而提高 CMOS运放电路的抗辐照特性 . Ionizing radiation effects on fluorinated and no F-implanted CMOS operational amplifiers are investigated,and the difference between the radiation performances is analyzed and compared.The results show that the suit F-implanted can availably control the increase of radiation induced oxide charge especially for interface state so that the capacity of radiation hardness is improved.
出处 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2003年第7期780-784,共5页 半导体学报(英文版)
关键词 注F CMOS运算放大器 电离辐照 跨导 fluorinated CMOS Op-Amps ionizing radiation transconductance
  • 相关文献

参考文献11

  • 1Yablonovich E, Allara D L, Chang C C, et al. Unusually low surface-recombination velocity on silicon and germanium surfaces. Phys Rev Lett, 1986,57 : 249.
  • 2Weinberger B R, Peterson G G, Eschrich T C, et al. Surface chemistry of HF passivated silicon: X-ray photoelectron and ion scattering spectroscopy results. J Appl Phys, 1986, 60:3232.
  • 3Morita M,Kubo T,Ishihara T,et al. Fluorine enhanced thermal oxidation of silicon in the presence of NF3. Appl Phys Lett, 1084,4S:1312.
  • 4Da Silva E F Jr,Nishioka Y,Ma T P. Radiation response of MOS capacitors containing fluorinated oxides. IEEE Trans Nucl Sci, 1987, NS-34 : 1190.
  • 5Ren Diyuan, Yu Xuefeng, Lu Wu, et al. Simple model for transconductance degradation by ionizing radiation in MOSFETs. Chinese Journal of Semiconductors, 1995,16 ( 7 ) : 533.
  • 6Zhang Guoqiang, Yan Rongliang, Yu Xuefeng, et al. Ionizing radiation responses of gate dielectric with two fluorine implantation energy. Chinese Journal of Semiconductors, 1994,15(1):64
  • 7Zhang Guoqiang, Yan Rongliang, Yu Xuefeng, et al. Effects of fluorine implantation before and after ploysilicon gate lithograph on radiation characteristics of MOS devices. Chinese Journal of Semiconductors, 1995, 16 (9): 695
  • 8Zhang Guoqiang, Yan Rongliang, Luo Laihui, et al. Ionizing radiation effects in fluorinated-CC4007 circuits. Chinese Journal of Semiconductors,lO96,17(1) :35
  • 9Zhang Guoqiang, Lu Wu, Yu Xuefeng ,et al. Ionizing radiation effects in fluorinated MOS field oxide. Chinese Journal of Semiconductors, 1997,18(6) : 466
  • 10Nishioka Y,Ohyu K,Ohji Y,et al. Hot-electron hardened Sigate MOSFET utilizing F implantation. IEEE Electron Device Lett,1989,10(4) :141.

同被引文献7

  • 1张国强.[D].,1998.
  • 2Wang X W,Wang Y,Ma T P.Imoprovement of radiationhardness due to aging of fluorinated and chlorinated Si/SiO2 MOS capacitors.IEEE Trans Nucl Sci,1992;39(6):2252.?A?A
  • 3Ma T P.Metal-oxide-semiconductor gate oxide reliability and the role of fluorine.J Vac Sci Technol,1992,A10(4):705.
  • 4Shaneyfelt M R,Fleetwood D M,Schwank J R,et al.Effects of burn-in on radiation hardness.IEEE Trans Nucl Sci,1994,41(6):2550.
  • 5McWhorter P J,Minokur P S.Simple technique for separating the effects of interface traps and trapped-oxide charge in metal-oxide-semiconductor transistor.Appl Phys Lett,1986,48(2):133.
  • 6Warren W L,Shanefelt M R,Fleetwood D M,et al.Electron and hole trapping in doped oxides.IEEE Trans Sci,1995,42(6):1731.
  • 7何宝平,姚育娟,彭宏论,张正选.环境温度、电离辐射剂量率对NMOSFET器件特性参数的影响[J].Journal of Semiconductors,2001,22(6):779-783. 被引量:11

引证文献2

相关作者

内容加载中请稍等...

相关机构

内容加载中请稍等...

相关主题

内容加载中请稍等...

浏览历史

内容加载中请稍等...
;
使用帮助 返回顶部