摘要
研究了用真空蒸发法在玻璃衬底上制备稀土掺杂纳米ZnO薄膜结构、导电性及光透射性能。结果显示 ,在 5 0 0℃氧化、热处理稀土元素Nd掺杂后能够明显改善纳米ZnO薄膜的结构特性 ,薄膜的晶粒尺寸随掺杂含量的增加而减小。掺Nd使ZnO薄膜的电性能有所改善但使纳米ZnO薄膜的光透射性有所降低。
The micro structures and properties of Nd doped ZnO films,grown on glass substrates by vacuum deposition,have been studied with X ray diffraction (XRD) spectroscopy.The results show that Nd doping strongly affects the microstructures of the films and the mean grain size of the films drastically reduces with the increase of Nd concentration.We found that Nd doping improves its electrical properties but reduces its optical transmission.
出处
《真空科学与技术》
EI
CAS
CSCD
北大核心
2003年第3期212-215,共4页
Vacuum Science and Technology
基金
内蒙古自然科学基金资助项目 (2 0 0 2 0 80 2 0 2 0 9)
