摘要
以几种典型的毫米波波段微机械传输线结构为研究对象,讨论了近几年的最新研究成果,包括微带、带状线、开放和封闭的共面波导。微机械传输线能够充分降低介质损耗,具有传输损耗小、工作频带宽、色散小、制作工艺能与传统集成电路工艺兼容等特点,是毫米波波段平面集成传输线应用的首选技术方案,同时微机械传输线的出现为毫米波单片集成电路以及毫米波系统的微型化提供了解决方案。
The micromachined transmission b'nes used to millimeter-wave system are discussed, including microstrip line, stripline, open and closed coplannar waveguides. Analysis shows that micromachined transmission lines is acceptable for millimeter-wave range applications with outstanding millimeter-wave performance. The micromachined transmission lines are characterized by low propagation loss, wide operation frequency band and low dispersion, and more importantly, these micromachined transmission lines are fabricated using standard integrated circuit foundry service. The micromachined transmission lines provided optimum solution for miniaturizing millimeter-wave sub-system and realizing monolithic millimeter-wave integrated circuits.
出处
《电子器件》
CAS
2003年第2期127-132,共6页
Chinese Journal of Electron Devices
基金
哈尔滨工业大学科学研究基金(项目号:HIT.2002.38)
关键词
毫米波
MEMS
传输线
单片微波集成电路
millimeter wave
microelectromachining system
transmission line
monolithic microwave integrated cir-cuits
