摘要
设计一种基于压杆屈曲原理的数字微镜装置 ,针对该装置建立机电动力学模型 ,应用龙格 库塔法和有限元数值方法求解其动力学模型中的隐函数。通过对该模型的完整机电动力学微分方程数值求解所作的运动仿真 ,得到了微镜基板的连续角位移曲线 。
A microstructure of digital micromirror device based on buckling theory is designed and its electromechanical dynamics model is established. The hidden functions in the dynamics model are found out by using numerical methods such as Runge Kutta method and Finite Element method. A numerical simulation to the whole motion differential equation is finished, and a continuous angular displacement curve of micro reflectmirror is obtained. It is concluded that the buckling microstructures has an advantage of light beam stability.
出处
《应用力学学报》
CAS
CSCD
北大核心
2003年第2期92-95,共4页
Chinese Journal of Applied Mechanics
基金
陕西省自然科学基金资助 ( 99C0 5 )
