金属多层膜超晶格结构研究

Studies on Superlattice Structure of Metallic Multilayer Film

用高分辨的三晶体X-射线衍射仪测量了Zr、Cu金属交替的多层膜的X-射线小角反射谱。用扩展了的Born-Wolf光学模型对Zr、Cu多层膜的X-射线小角反射数据进行了定量分析。结果表明,该金属多层膜在其生长方向具有超晶格结构。在两层金属膜之间的界面上,由于内扩散,形成了界面交混层,它使X-射线小角反射所产生的高阶Bragg峰的强度减弱。由于两种金属膜的晶格不匹配,使高阶Bragg峰加宽。界面的粗糙度可用来模拟X-射线小角反射曲线的阻尼振荡效应。

The X-ray reflectivity of Zr -Cu metallic multiplayer film at low-angle was mea sured by using a high-resolution triple-axis X-ray diffractometer.In terms of the expanded Born-Wolf optical model,the X-ray reflectivity data at low-angle were quantitatively analysed.Re sults in-dicated that the Zr (40nm)/Cu(40nm) 75 metallic multiplayer film with equal layer thick ness shows an artificially superlattice structure along the growth direction.Because of in terdiffus-sion there exist the interface micing layers,which reduce the high-order Bragg peak inten sities of the X-ray reflectivity at low-angle.The misfit of lattice constants between the two metals makes the high-order Bragg peaks broad.