摘要
介绍了一种新型的三维微细加工技术 ,描述了自行开发的双光子微细加工实验系统。双光子三维微细加工技术利用材料与飞秒激光束在焦点局域发生的双光子激发 ,通过逐点扫描 ,实现微器件的三维成型。由于材料发生双光子激发的几率与激发光强的平方成正比 ,所以具有极高瞬时光强的飞秒激光器和可以对光束进行强聚焦的显微镜装置成为系统的关键部件 ,对此进行了详细的说明。最后 ,给出了部分利用上述加工系统所获得的初步实验结果。
The 2 photon 3D microfabrication technology employs the 2 photon excitation locally induced between the femtosecond laser and the material to achieve 3D shaping through point to point scan. For the probability of two photon excitation is in direct proportion to the squared intensity of laser, both the femtosecond laser with extremely high pulse intensity and the microscope with high numerical aperture become critical components in the system, and therefore much detail information is provided on this particular aspect. Some preliminary experimental results obtained with the machining system are presented as well.
出处
《光学精密工程》
EI
CAS
CSCD
2003年第3期234-238,共5页
Optics and Precision Engineering
基金
国家自然科学基金资助项目 (No .5 0 2 75 14 0 )
