摘要
基于Michelson干涉仪测量原理研制的微轮廓测量仪 ,载物平台采用步进电机和压电陶瓷 (PZT)两级闭环驱动与定位 ,步进电机用于快速粗定位和扩大测量范围 ,压电陶瓷用于精密定位 ,重复定位精度为 10nm ;测量光路采用共干涉系统 ,对机械振动 ,温度漂移不敏感 ;测量范围 2 0mm× 2 0mm× 0 .4mm ,纵向分辨率为 0 .32 μm ,横向分辨率为 0 .5 μm。
The laser profilometer based on the Michelson interferometry principle, has its platform driven by a stepper motor for fast rough position and expansion of measuring range, and by piezoelectric ceramic for precision positioning with a repetitive positioning accuracy of 10 nm. A common path interference system, which is not sensitive to mechanical vibration and temperature drift, is used in the measuring optical path. The laser profilometer has a measuring range of 20 mm×20 mm×0.4 mm, a longitudinal resolution of 0.32 μm, and a lateral resolution of 0.5 μm.
出处
《光学精密工程》
EI
CAS
CSCD
2003年第3期245-249,共5页
Optics and Precision Engineering
基金
2 0 0 0年教育部科学技术研究重点资助项目(No .0 0 117)
