使用TDL-J75型单晶炉生长大直径YAG晶体工艺

Growth of Large-diameter YAG Crystal with TDL-J75 Type Single Crystal Furnace

本文结合作者生产、实验工作 ,介绍了使用TDL J75型单晶炉 ,采用中频感应加热、铱坩埚引上法生长直径 5 0～ 75mm、单晶重量 36 0 0g左右的YAG晶体工艺。用该工艺生长直径 5 0mm晶体的合格率可达 85 %以上 ,生长直径75mm晶体的合格率达 75 %以上 。

The YAG crystals with 50 70mm in diameter,200 280mm in length and 3600g in weight were grown by Czochraski method with mid frequency induction heating,iridium (Ir) crucible and TDL J75 type single crystal furnace.The final product rate is above 75% and 85% when the crystal size is 75mm and 50mm in diameter respectively,so the method can be used in large scale production.