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化学气相沉积TiN薄膜组织性能研究 被引量：2

Study on Microstructure and Property of TiN Thin Film Layer Obtained by Chemical Vapor Deposition
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摘要 研究了用化学相沉积方法在钢基体表面形成TiN薄膜的组织和性能结果表明,由于钢中的铁和碳 向膜层中扩散,膜层的组织中存在有少量的α-Fe,而且薄膜的硬度与钢的含碳量有不可忽视的关 系。 This paper deals with the macrostructure and property of TiN film layer formed on the surface of steel matrix by chemical vapor deposition. The result shows that a small amount of α-Fe exists in the film layer microstructure due to diffusing of iron atoms and carbon atoms in the steel into film layer, and hardness of film layer is related to carbon content in the steel.
作者 王豫
机构地区 安徽工业大学
出处 《热处理》 CAS 2003年第2期14-17,共4页 Heat Treatment
关键词 氮化钛 薄膜 化学气相沉积 组织 性能 Α-FE 含碳量 钢 TiN, film layer, microstructure, hardness.
分类号 TG174.444 [金属学及工艺—金属表面处理]
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参考文献4

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共引文献13

同被引文献21

  • 1王家全.激光加工技术[M].北京:中国计量出版社,1992..
  • 2Chen X L, Mazumder J. in Situ laser - induced fluorescence studies of laser chemical Vapor deposition of TiN thin films[ J]. Applied physics letters,1994,65 (3) :298 -300
  • 3A. Kar, J. Mazumder. Laser chemical vapor deposition of thin films [J]. Materials Science & Engineering, 1996, B41:368 -373
  • 4Devia D M, Restrepo-Parra E, Arango P J. Comparative study of ti- tanium carbide and nitride coatings grown by cathodic vacuum arc technique[J]. Appl Surf Sci, 2011,258(3) : 1164.
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  • 7Karlsson L, Hultmanb L, Johanssonb M P, et al. Growth, micro structure, and mechanical properties of arc evaporated TiCxN1-x (0≤x≤l) films[J]. Surf Coat Technol,2000,126(1) : 1.
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  • 9Zhang J, Xue Q, Li S X. Microstructure and corrosion behavior of TiC/Ti(CN)/TiN multilayer CVD coatings on high strength steels[J]. Appl Surf Sci,2013,280:626.
  • 10Rebelo De Figueirdeoa M, Neidhardta J, Kaindib R, et al. Forma tion mechanisms of low-friction tribo-layers on arc-evaporated TiCI-x Nx hard coatings[J]. Wear, 2008,265(3-4) : 525.

引证文献2

二级引证文献14

热处理
2003年 第2期

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