摘要
始于 2 0世纪 60年代的微机电系统 (MEMS)是在微电子技术基础上产生和发展起来的多学科交叉的前沿科学研究领域 ,是 2 1世纪的核心技术之一 .介绍了MEMS的形成、发展、基本研究内容、流行设计分析软件和主要制造工艺应用及微器件。
The microelectromechanical system(MEMS), which can be traced to 1960's, developes on the basis of microelectronics. It is one of key technologies in the 21st century and the scientific researches frontier of multi?disciplines. This paper introduces the MEMS's formation, development, basic research contents, fashional design and analysis software, applications of the basic manufacturing technology as well as the types and the current applications of micro apparatus and microsystem.
出处
《山东理工大学学报（自然科学版）》
CAS
2003年第1期107-110,共4页
Journal of Shandong University of Technology:Natural Science Edition
基金
国家自然科学基金重点项目资助 (5 0 13 5 0 40 )
