摘要
导轨副的摩擦和磨损影响机构的进给精度 ,摩擦产生的金属粉尘使微进给机构不能满足超洁净制作环境要求。磁悬浮技术应用于微进给机构 ,可消除摩擦。结合直线电机能实现零传动的特点 ,分别设计了磁悬浮轴承形式和磁悬浮导轨形式的两种微进给机构 ,分析了它们的特点 ,阐明了进一步改善的方向。理论分析计算该微进给机构在垂直及水平方向的误差可控制在± 1 μm内 。
Frictional forces and wear between guides affect mechanism feed accuracy, and the metal powder brought by friction is the main contamination in the chip processing, so the feed mechanism can not meet the environment requirements of the chip processing.The frictional forces and wear can be avoided by applying magnetic levitation technology. Two styles of feed mechanism are designed in this paper. One is based on magnetic bearing, another is based on magnetic guide. Their peculiarities are discussed in detail. Further, improving directions of the mechanism design are pointed out. Errors of the feed mechanism in z and y directions are calculated. A theoretical analysis of the mechanism errors shows that deviations of the y and z position will not exceed 1 μm, feed accuracy in the x direction is expected to be closed to the sub-micron accuracy.
出处
《中国机械工程》
EI
CAS
CSCD
北大核心
2003年第13期1090-1093,共4页
China Mechanical Engineering
基金
吉林省 2 0 0 2年度自然科学基金资助项目(2 0 0 2 0 62 1 )
2 0 0 2年度中国科学院研究生科学与社会实践资助专项创新研究类项目
关键词
磁悬浮
微进给机构
直线电机
超洁净
进给精度
magnetic levitation micro feed mechanism linear motor super cleanness feed accuracy
