摘要
Airborne pa rt icle counters are used widely to test the air cleanliness of cleanrooms. The cur rent Chinese national standard of airborne particle counter calibration, GB6167 -85, Methods for Testing the Performance of Dust Particle Counter, has kept the same for more than 10 years. It is necessary to be amended in time. This paper discusses the differences between Chinese airborne particle counter calibration procedure and other new calibration procedures in other countries, and points ou t the defects of current Chinese national standard.The draft of revised Chinese National Standard is also introduced. The new revised standard, Methods for Test ing the Performance of Airborne Particle Counter, covers two level calibrations: primary and secondary. Primary calibration procedure includes testing 6 kinds of performances:sample airflow rate, false counting, particle size accuracy and re solution, particle counting stability, counting efficiency and particle concentr ation limit. Secondary calibration is a relative comparing test method to verify the counting accuracy of calibrated airborne particle counters.Finally, how to keep the calibration traceability is suggested.
Airborne pa rt icle counters are used widely to test the air cleanliness of cleanrooms. The cur rent Chinese national standard of airborne particle counter calibration, GB6167 -85, Methods for Testing the Performance of Dust Particle Counter, has kept the same for more than 10 years. It is necessary to be amended in time. This paper discusses the differences between Chinese airborne particle counter calibration procedure and other new calibration procedures in other countries, and points ou t the defects of current Chinese national standard.The draft of revised Chinese National Standard is also introduced. The new revised standard, Methods for Test ing the Performance of Airborne Particle Counter, covers two level calibrations: primary and secondary. Primary calibration procedure includes testing 6 kinds of performances:sample airflow rate, false counting, particle size accuracy and re solution, particle counting stability, counting efficiency and particle concentr ation limit. Secondary calibration is a relative comparing test method to verify the counting accuracy of calibrated airborne particle counters.Finally, how to keep the calibration traceability is suggested.
