超高级别微电子洁净厂房的测试

Testing high class clean rooms in a microelectronic factory

指出超高级别微电子洁净厂房环境参数对产品质量至关重要。介绍了与超高级别微电子洁净厂房有关的分级标准 ,并对某 0 .1 μm 1级洁净厂房作了实际测试 ,给出测试项目、测试方法和使用的主要测试仪器。

Points out that the environment parameters of high class clean rooms in a microelectronic factory directly affect the product quality. Presents a current standard for high-class microelectronic clean rooms. Tests a high class building of class 1 with grade 0.1 μm. Summarizes the required testing items, procedures and apparatus in such a factory.