微机械硅加速度计的性能分析

CHARACTERIZATION OF MICRO-MECHANICAL SILICON ACCELEROMETER

介绍了各种类型的微机械硅加速度计的工作原理及特性,通过比较各类型硅加速度计的优劣,提出了高灵敏度硅加速度计的设计思路及实现方法。

The basical principles and characterizations of micro\|mechanical silicon accelerometer are introduced. The design project of high precision silicon accelerometer is presented by comparing various silicon accelerometers.\;