超精密隔振平台主动振动控制系统设计

Active vibration control system design for ultra-precision vibration isolation platform

建立了超精密隔振平台的结构及动力学模型,设计了一种新型的双向电磁作动器,并采用PID控制算法建立了主动振动控制系统模型,经Matlab软件仿真分析表明,该系统具有良好的隔振效果。

Structure model and dynamics model of ultra-precision vibration isolation platform was established.We designed a new-typed double direction electromagnetic actuator,and set up a model of active vibration control system by the PID control algorithm. Through analysis with software of Matlab, it is made clear that this system have favorable vibration isolation effect.