一种交叉梁硅微加速度开关的设计

Design of Silicon Micromachined Acceleration Switch with Cross Beams

针对一种新型交叉梁硅微加速度开关的设计技术进行了研究,首先推导了结构的静态刚度,确定了一种敏感芯片结构尺寸,在此基础上利用有限元方法仿真计算不同方向加速度作用下的结构变形情况。从结构特点和加工方法出发,分析了可能影响精度的几种加工误差,并给%时,梁厚的误差要求。其分析计算结果可指导该种类型加速度开关的设计和加工。

The designing technique of a micromachined silicon acceleration switch with cross beams is discussed in this paper. At first, on the basis of static stiffness deduced and a set of geometry sizes of sensitivity element,the deformed shapes under acceleration from different direction are simulated. According to the structure characteristics and micromachining methods, several machining errors that can affect its precision are analyzed,and the error limit of beams thickness is provided on the condition that the switch action error is smaller than ±5%. The analyzing and calculating results can guide the designing and machining of this kind of acceleration switch.