摘要
研究在光学显微镜下 ,运用两个独立的三维工作台分别控制针尖和碳纳米管的位置 ,将碳纳米管吸附在传统的原子力显微镜针尖上。首先将碳纳米管粘附在导电的胶带上 ,然后用涂胶的针尖与其接触将碳纳米管粘附到针尖上 ,最后运用电蚀的方法优化碳纳米管针尖的长度 ,以达到高分辨率的要求。运用制作的碳纳米管针尖对硅表面的深槽进行成像 。
Carbon nanotubes are ideal structures used for atomic force microscope (AFM) tips because of their small diameter, high aspect ratio and high strength. Multiwall carbon nanotubes attached on conventional AFM silicon tip using an optical microscope with two independent translation tables. Purified nanotubes are aligned on the conductive tape, and attached on the AFM tip. Then their length is decreased using electrical etching. Using these modified tips, we obtained structures with steep trench on the silicon that was previously unobservable with conventional AFM cantilever tips.
出处
《中国机械工程》
EI
CAS
CSCD
北大核心
2003年第15期1329-1330,共2页
China Mechanical Engineering
基金
国家自然科学基金资助项目 ( 5 0 2 0 5 0 0 6)
哈尔滨工业大学跨学科交叉性研究基金项目 ( HIT.MD.2 0 0 1.0 4)