液相外延法制备LiNbO_3薄膜的研究和进展

Research and Progress of LiNbO_3 Thin Films Prepared by Liquid Phase Epitaxy

讨论了液相外延法制备LiNbO3 薄膜过程中 ,衬底和助熔剂的选择对LiNbO3 薄膜制备的影响及掺杂改性问题 ,简要地介绍了LiNbO3 薄膜的一些性能及光学应用。研究表明 ,目前可用液相外延法在LiTaO3 、掺镁 (5mol% )的同成分LiNbO3 及纯的同成分或近化学计量比LiNbO3 单晶衬底上制备出具有较高光学质量的LiNbO3 薄膜。讨论了液相外延法制备LiNbO3 薄膜过程中存在的主要问题、发展前景及今后的研究方向。

The influences of substrates and fluxes on the preparation of LiNbO 3 thin films and properties of ion-doped LiNbO 3 thin films were discussed. Some properties and optical applications of LiNbO 3 thin films were introduced.It is shown that high optical quality LiNbO 3 thin films can be prepared on single crystals such as LiTaO 3,5mol% MgO-doped congruent LiNbO 3 and pure congruent or near-stoichiometric LiNbO 3 by liquid phase epitaxy method.The main existing problems,the development prospects and research directions of LiNbO 3 thin films prepared by liquid phase epitaxy were also discussed.