基于跳变线估测的相位包裹去除法

Phase Unwrapping Method Based on Jumping Order Estimation

针对相移干涉术中噪声点产生的相位跳变,提出一种基于跳变线估测的相位包裹去除法。该方法简单实用、与去包裹路径无关,可以有效地消除干涉图噪声所产生的位相跳变,消除噪声包裹导致的相位图上的"拉线"现象,恢复真实相位。用于相移干涉测量表面微观形貌,取得了较好的实验结果。

A new phase unwrapping method was proposed based on jumping order estimate aiming at phase discontinuous and jumping caused by oddity points in interference pattern. This method is of simplicity and practicality and is unrelated to scanning route. It can remove order jumping and wire drawing caused by noise wrapped phase and resume true phase at the same time. Preferable experimental results are obtained in phase-shifting interference measurement.