摘要
大面积光学级金刚石自支撑膜的制备和加工是近年来在CVD金刚石研究领域的最重要的技术进展之一。综述了北京科技大学近年来在CVD金刚石膜光学应用领域的研究进展。给出了采用高功率直流电弧等离子体喷射 (DCArcPlasmaJet)CVD工艺制备大面积光学级金刚石自支撑膜的研究结果 ,并报道了对所制备的光学级金刚石自支撑膜的光学、力学 (机械 )、热学和微波介电性能的最新研究结果。
The preparation and fabrication of large area optical grade freestanding diamond films is one of the most important technical progresses in the field of R&D of CVD diamond films achieved in recent years. The present paper summarizes the recent progress made in the University of Science and Technology Beijing. Progress on the preparation and polishing of large area optical quality freestanding diamond films by high power DC Arc Plasma Jet CVD method is described. New results on the optical, thermal, mechanical, dielectric properties and the high temperature oxidation behavior of the optical grade freestanding diamond films are reported.
出处
《红外技术》
CSCD
北大核心
2003年第4期1-7,共7页
Infrared Technology
基金
86 3计划支撑项目 :(项目合同号为 :86 3 715 0 2 (Z) A
86 3 715 Z38 0 3
2 0 0 2AA30 5 5 0 8)
