智能型纳米级抛光机的控制系统

Control System of Intelligent Polishing Machine at Nanometer Level

介绍了智能型纳米级抛光机的智能控制系统 ,对其实现方法进行了研究 ,分析了智能控制系统的组成 ,提出并建立了基于专家控制系统的解决方案。采用WindowsCE软件平台 ,图形化界面功能指示 ,以及采用高可靠性的实时操作系统、超级数模混合RISC嵌入式处理器、高精度光栅传感器、无级调速、无刷直流电动机驱动等技术 。

In this paper, the intelligent control system of the intelligent polishing machine at nanometer level is introduced, its realization method is studied, its structure is analyzed as well as the solution based on the expert control system is proposed and established. The polishing machine is intelligently controlled by using Windows CE software platform, graphic interface function indicator, just in time operating system of high reliability, RISC inserted processor of super digital analog hybrid, high accuracy grating sensor, stepless speed regulation as well as brushless DC motor driver technology.