期刊文献+

Quantum Well Intermixing of InGaAsP QWs by Impurity Free Vacancy Diffusion Using SiO_2 Encapsulation

使用SiO_2介质膜实现InGaAsP量子阱混杂(英文)
下载PDF
导出
摘要 Experiment on quantum well intermixing (QWI) of InGaAsP QWs by impurity free vacancy diffusion (IFVD) using SiO 2 encapsulation is reported.A maximum band gap wavelength blue shift as large as 200nm is realized.Furthermore,an FP laser blue shifted 21nm by QWI is fabricated with characteristics comparable with the as grown one. 报道了使用SiO2 介质膜导致的无杂质空位扩散实现InGaAsP多量子阱混杂的实验 ,得到 2 0 0nm的最大带隙波长蓝移 .另外 ,采用量子阱混杂制作了蓝移的FP腔激光器 。
出处 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2003年第8期785-788,共4页 半导体学报(英文版)
关键词 photonic integrated circuit quantum well intermixing IFVD wavelength blue shift 光子集成回路 量子阱混杂 无杂质空位扩散 波长蓝移
  • 相关文献

参考文献7

  • 1Delorme F,Slempkes S,Alibert G,et al. Buttjoint DBR laser with 15nm tunability grown in three MOVPE steps. Electron Lett, 1995,31(15) :1244.
  • 2Sasaki T, Yamaguchi M, Kitamura M. Monolithically integrated multi-wavelength MQW DBR laser diodes fabricated by selective MOVPE. J Cryst Growth, 1994,145 : 846.
  • 3Si S K,Yeo D H,Yoon K H,et al. Area selectivity of In-GaAsP-InP multiquantum-well intermixing by impurity-free vacancy diffusion. J Sel Topics Quantum Electron, 1998, 4(4):619.
  • 4Xia W,Pappert S A,Zhu B,et al. Ion mixing of Ⅲ-Ⅴ compound semiconductor layered structures. J Appl Phys, 1992,71(6):2602.
  • 5Mclean C J,Mckee A, Lullo G,et al. Quantum well intermixing with high spatial selectivity using a pulse laser technique.Electron Lett, 1995,31(15) : 1284.
  • 6Sudo S, Onishi H, Nakano Y,et al. Impurity-free disordering of InGaAs/InGaAsAs quantum wells on InP by dielectric thin cap films and characterization of its in-plane spatial resolution. Jpn J Appl Phys,1996,35(2B) :1276.
  • 7Kuzuhara M, Nozaki T, Kanejima T. Characterization of Ga out-diffusion from GaAs into SiOxNy films during thermal annealing. J Appl Phys, 1989,66(12) : 5833.

相关作者

内容加载中请稍等...

相关机构

内容加载中请稍等...

相关主题

内容加载中请稍等...

浏览历史

内容加载中请稍等...
;
使用帮助 返回顶部