高精度位置检测及定位技术研究

Research on high-accuracy position detection and alignment technology

介绍了利用差动摩尔技术进行高精密位置检测的理论基础及其自动定位系统的实现 .差动摩尔信号将反映位移变化的光强值有效地放大 1倍 ,极大地提高了位置检测信号的灵敏度 .工控机根据检测到的差动摩尔信号不断地发出控制脉冲 ,采用步进电机驱动工作台到达± 0 5 μm的定位精度 ,并使位置偏差始终控制在此精度范围内 .给出了系统构造和整个定位过程的实验曲线 。

The basic theory of high precise position detection using differential Moire technique is introduced, and a precise automatic alignment system was designed and achieved. Differential Moire signals magnify the laser intensity 2 times, which denotes the position variations, and highly improve the sensibility of position detection signals. According to the differential Moire signals, computer sends control pulses continuously to Motors. The alignment with an accuracy of ±0.5 μm is achieved and maintained. The automatic alignment system construction and experiment results are presented. It proves that the differential Moire technique is a novel and promising precise positioning method.