外差式激光干涉振动一次校准

Primary Vibration Calibration by Laser Heterodyne lnterferometer

文章先扼要介绍ISO 16 0 6 3- 11中所列 3种激光干涉振动一次校准方法 ,以及用零差式迈克耳孙激光干涉仪正弦逼近法实现加速度的灵敏度和灵敏度相移的校准 ,然后在此基础上 ,从原理、结构和使用等方面介绍外差式激光干涉振动一次校准 ,以及PTB如何用外差式激光干涉技术较大幅度地提高与扩展振动校准频率、校准位移等技术。

Three methods of primary vibration calibration by laser interferometer in ISO16063 11 are simply described, and the realization of sensitivity magnitude S and phase shift Δ φ with a modified Michelson intertferometer which based on homodyne is also briefly discussed. Then, a laser interferometry technique of Mach Zehnder interferometer based on heterodyne, and the employment circumstances of laser heterodyne interferometer on primary vibration calibration in PTB laboratory are presented. It has been demonstrated that there are many the advantages of primary vibration calibration by laser heterodyne interferometer, especially on the amplitude and phase calibration of accelerometer in nanometer range. At the same time, it is also showed that the best calibrating results have been acquired on frequency up to 20 kHz, displacement magnitude low to 1nm via the important effect of laser heterodyne interferometer to primary vibration calibration in PTB laboratory.