钢表面化学气相沉积TiC晶体的择优取向

PREFERRED ORIENTATION OF DEPOSITED TiC COATING ON STEEL BY CVD

本文用化学气相沉积(CVD)法,以TiCl_4-CH_4-H_2为原料气体,在不锈钢表面获得了致密的TiC膜.研究了TiC的成膜速度、表面形貌和晶体择优取向与沉积条什的关系.结果表明,沉积温度T_(dep),碳钛比CH_4/TiCl_4强烈地影响了TiC的成膜速度、表面形貌和晶体择优取向.CH_4/TiCl_4低时,TiC晶体的择优取向为(220):而CH_4/TiCl_4高时,TiC晶体的择优取向为(200).TiC晶体的择优取向主要取决于气氛中活性碳的平衡浓度。

Investigation was made of the deposition rate, surface morphology and crystal preferred orientation of the dense TiC coating onto austenitic stainless steel in relation with CH_4/TiCl_4 mole ratio and temperature adopted in CVD processing. When the CH_4/TiCl_4 ratio is low or high, their preferred orientation may be (220) or (200), respectively, which is mainly dependent on the equilibrium concentration of active carbon in vapour phase.