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非球面的光学测试技术 被引量:7

Optical Testing Technique For Aspherical Surface
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摘要 介绍非球面及其相关知识,讨论了非球面光学检测的研究现状.按照测量原理的不同,对干涉法、阴影法、激光扫描法等几类典型的非球面测试技术进行了分析.通过比较各种方法的优缺点和适用范围,提出了在线检测小型非球面的研究方向. This paper introduces the status of optical testing technology aspherical surface for aspherical surface.Some typical methods are summarized and generalized,including interferometry,shadow method and laser scanning method.The principle of each method is analyzed in detail.On the base of comparing advantages,disadvantages and applying scope of all methods,the project for on-line measurement of small-scale aspherical surface is presented.
出处 《南昌大学学报(工科版)》 CAS 2003年第2期51-54,共4页 Journal of Nanchang University(Engineering & Technology)
关键词 非球面 光学测试 干涉测试法 aspherical surface optical testing measure of interferometry
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参考文献4

  • 1Zhisheng Yun, Zhongben Liu, Yulin Li. Aspheric Surface Testing With a Liqud Compensatory Interferometer[J ]. Opt. Eng,1998,37(4).
  • 2Zhisheng Yun, Yee Loy Lam, Yan Zhou, Yulin Li, et al. Simple Technique For Testing Deep Aspherieal Surfaces[ J ]. 1999,38(4).
  • 3Andrianto Handojo and Hans J. Frankena. Testin Aspheric Surfaces: Simple Method With a Circular Stop [J ]. APPLIED OPTICS, 1998,37(25).
  • 4Tsuguo Kohno, Daiji Matsumoto, Takanori Yazawa, Yutaka Uda. Radial Shearing Interoferometer For in- process Measurement of Damond Turning[ J ]. Opt. Eng, 2000,39 (10).

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