摘要
介绍超精密仪器工程研究中的几个最近研究进展:二维和三维微小内尺度精密和超精密测量技术、超精密三维轮廓与坐标测量技术、无基准三维轮廓测量技术、超精密回转基准和直线基准技术、大输出力、高稳定性超微驱动技术等。这些问题代表了目前超精密仪器工程研究的发展趋势,优先发展仪器单元技术和解决关键技术是促使仪器工程精度水平迅速提高的关键。
Some recent developments in super precision instruments engineering is introduced in the paper,precision and super precision measurements technology of micro inside\|size in two\|dementional and three\|dementional coordinate; measurements technology of super precision three\|dementional contour and coordinate; measurement technology of non\|datum three\|dementional contour; super precision gyroidal datum and straight datum technology ;great out-put power; high stabilization and super micro\|drive technology and so on. These problems represent the development trend of research in super precision instruments engineering nowadays. The key lies in the developments of instrument cell for the priority and the rapid enhancement of the precision level of instruments.
出处
《中国计量学院学报》
2003年第2期83-88,共6页
Journal of China Jiliang University
基金
黑龙江省杰出青年基金资助(HJJ99 1201)
