摘要
文中给出了一个以氟化氪固体激光器做光源,以电荷耦合图像传感器为光屏,应用夫朗禾费衍射原理,实现对细丝直径在线检测自动控制。该方案对相关企业质量控制的自动化是有意义的。
This paper attempts to give a conception about the automatic detection of thin line diameters by using the KrF laser as a light source and the charge couple image transfer device as a light screen.The principle is the diffraction of Fraunhofer.This conception is very useful to relate enterprises for the automatic control of product quality.
出处
《工业仪表与自动化装置》
2003年第4期31-32,共2页
Industrial Instrumentation & Automation