期刊文献+
任意字段
题名或关键词
题名
关键词
文摘
作者
第一作者
机构
刊名
分类号
参考文献
作者简介
基金资助
栏目信息

激光辐照下薄膜镜面波纹损伤机理研究 被引量：2

Mechanism of laser induced ripple damage on a film mirror
下载PDF
导出
摘要 　用透镜将脉冲激光束聚焦在铝膜镜面上,在部分样品的激光损伤边缘区,出现波纹状损伤形貌。大多数情况下,有多套波纹同时存在,在镜面形成花纹,或者其中有一两套波纹占优势。提出了脉冲激光辐照下光学元件损伤区边缘产生波纹的一种光干涉模型:认为样品表面本身存在微米级杂质颗粒或者表面缺陷点在激光辐照下首先产生鼓包变形,鼓包或杂质颗粒将激光反射(散射)在未发生变形的区域,与直接辐照在该区域的激光束产生干涉,使得变形区周围的光强呈周期性分布,当变形区进一步损伤后,则在损伤区周围留下了波纹状图案。模拟实验验证了这种设想。 Pulsed laser induced ripple damage on an aluminum film mirror has been investigated by experiments. Ripples have been found at the periphery of damage site by atomic force microscopy. In most cases, several set of ripples appear at the same time in the same area. A laser interference theoretical model has been presented to explain pulsed laser induced ripples at the periphery of damage site in optical surface. This model assumes that the impurity grain or laser induced sphere-like distortion at the surface of optical sample reflects or scatters laser beam to its periphery area, and this reflected or scattered beam interferes with the laser beam irradiated directly on this area. So the beam spatial profile becomes periodic and ripple damage morphology forms instantly. A simulated experiment is also presented to validate this assumption.
作者 王伟平 吕百达 刘仓理 袁永华 张大勇 罗飞
机构地区 中国工程物理研究院流体物理研究所 四川大学激光物理与化学研究所
出处 《强激光与粒子束》 EI CAS CSCD 北大核心 2003年第9期836-840,共5页 High Power Laser and Particle Beams
基金 国家863计划项目资助课题 中国工程物理研究院科学技术基金资助课题
关键词 激光效应 激光损伤 光学表面 波纹 原子力显微镜 Laser applications Laser damage Mathematical models Mirrors Morphology Surface properties
分类号 TN246 [电子电信—物理电子学]
  • 相关文献

参考文献8

  • 1王伟平,吕百达,刘仓理,张大勇,骆永全,谷卓伟.脉冲激光引起铜膜镜面的环形损伤波纹研究[J].强激光与粒子束,2003,15(3):225-228. 被引量：3
  • 2Young J F,Preston J S,Van Driel H M,et al. Laser induced periodic surface structure. Ⅱ. Experiments on Ge,Si, Al,and brass[J]. Phys Rev, 1983, 27:1155.
  • 3Serna K, Afonso C N, Petford A K, et al. Structural ripple formation in Ge/Sb multilayers induced by laser irradiation[J]. Applied Physics A, 1994, 58:197--202.
  • 4Giust G K, Sigmon T W. New ripple patterns observed in excimer-laser irradiated SiO2/polyerystalline silieon/SiO2 structures[J]. Appl Phys Lett, 1997,70(26):3552.
  • 5Yu J J, Lu Y F. Laser engineered rippling interfaces for developing microtexture ,adherent coating and surface coupling[A]. Proe of SPIE[C]. 1999, 3898:252.
  • 6Singh P A, Kapoor A, Tripathi N K, et al. Laser damage studies of silicon surfaces using ultra-short laser pulses[J]. Opticsand Laser Technology, 2002, 34:37--43.
  • 7Lu Y F, Yu J J, Choi W K. Theoretical analysis of laser-induced periodic structures at silicon-dioxide/silicon and silicon-dioxide/aluminum interfaces[J]. Appl Phys Lett, 1997, 71(23):3439.
  • 8Gurtman G, Wilson R, Rice M. Laser damage of silicon oxynitride mirror:Comparison of theory and experiment[A]. Proc of SPIE[C].2000, 3902:369--382.

二级参考文献10

  • 1Young J F, Preston J S, Van Driel H M, et al. Laser induced periodic surface structure. II. Experiments on Ge, Si, Al, and brass[J]. Phys Rev, 1983, 27:1155.
  • 2Serna K, Afonso C N, Petford A K, et al. Structural ripple formation in Ge/Sb multilayers induced by laser irradiation[J]. Applied Physics A, 1994, 58:197-202.
  • 3Campbell E E B, Ashkenasi D, Rosenfeld A. Ultra-short-pulse laser irradiation and ablation of dielectrics[J]. Materials Science Forum, 1999, 301:123.
  • 4Giust G K, Sigmon T W. New ripple patterns observed in excimer-laser irradiated SiO2/polycrystalline silicon/SiO2 structures[J]. Appl Phys Lett, 1997, 70(26):3552.
  • 5Yu J J, Lu Y F. Laser engineered rippling interfaces for developing microtexture, adherent coating and surface coupling[A]. SPIE[C]. 1999, 3898:252.
  • 6Sigman A E, Fauchet P M. Stimulated wood's anomalies on laser-illuminated surfaces[J]. IEEE Journal of Quantum Electronics, 1986, 22(8):1384.
  • 7Singh P A, Kapoor A, Tripathi N K, et al. Laser damage studies of silicon surfaces using ultra-short laser pulses[J]. Optics and Laser Technology, 2002, 34:37-43.
  • 8Lu Y F, Yu J J, Choi W K. Theoretical analysis of laser-induced periodic structures at silicon-dioxide/silicon and silicon-dioxide/aluminum interfaces[J]. Appl Phys Lett, 1997, 71(23): 3439.
  • 9Birnbaum M. Semiconductor surface damage produced by ruby laser[J]. J Appl Phys, 1965, 36:3688.
  • 10赖祖武,谈效华,赖宗力,向伟.激光辐照薄膜镜面产生损伤现象的研究[J].强激光与粒子束,1992,4(2):255-259. 被引量：6

共引文献2

同被引文献12

  • 1范树海,贺洪波,邵建达,范正修,赵元安.表面热透镜薄膜吸收测量灵敏度提高方法[J].物理学报,2006,55(2):758-763. 被引量：12
  • 2Serna K, Afonso C N, Petford A K, et al. Structural ripple formation in Ge/Sb multilayers induced by laser irradiation[J]. Appl Phys A,1994, 58:197-202.
  • 3Giust G K, Sigmon T W. New ripple patterns observed in excimer-laser irradiated SiO2/ polycrystalline silicon/ SiO2 structures[J]. Appl Phys Lett,1997,70(26) :3552.
  • 4Yu J J, Lu Y F. Laser engineered rippling interfaces for developing microtexture,adherent coating and surface coupling[C]//Proc of SPIE. 1999,3898 : 252.
  • 5Singh P A, Kapoor A, Tripathi N K, et al. Laser damage studies of silicon surfaces using ultra 2 short laser pulses[J]. Optics and Laser Technology,2002,34 : 37-43.
  • 6Lu Y F, Yu J J, Choi W K. Theoretical analysis of laser-induced periodic structures at silicon-dioxide/silicon and silicon-dioxide/aluminum interfaces [J]. Appl Phys Lett, 1997,71(23) :3439.
  • 7Osgood R M, Ehrlich D J. Optically induced microstructures in laser photodeposited metal films[J]. Opt Lett ,1982,7(8):385-387.
  • 8Gorodetesky G, Kozyaka T G, Melcher R L, et al. Calorimetric and acoustic study of ultraviolet laser ablation of polymers[J]. Appl Phys Lett, 1985,46(9) : 828-830.
  • 9Lemons R A, Bocsh M A. Periodic motion of the crystallization front during beam annealing of Si films[J]. Appl Phys Lett, 1981,39(4) : 343-345.
  • 10Emmony D C, Howson P, Willis L J. Laser mirror damage in germanium at 10.6 μm[J]. Appl Phys Lett, 1973,23(11) :598-560.

引证文献2

二级引证文献4

强激光与粒子束
2003年 第9期

相关作者

内容加载中请稍等...

相关机构

内容加载中请稍等...

相关主题

内容加载中请稍等...

浏览历史

内容加载中请稍等...
;
使用帮助 返回顶部