摘要
A new polyaluminosilazane precursor was prepared by polymerizing hexamethylcyclotrisilazane (HMCTS) with aluminum acetylacetonate and the structure of the precursor was characterized by FT-IR and XPS analysis. Result shows that aluminum was incorporated mainly in form of Al-N bond. Oxygen was also detected and found that it was mainly bonded to silicon.
A new polyaluminosilazane precursor was prepared by polymerizing hexamethylcyclotrisilazane (HMCTS) with aluminum acetylacetonate and the structure of the precursor was characterized by FT-IR and XPS analysis. Result shows that aluminum was incorporated mainly in form of Al-N bond. Oxygen was also detected and found that it was mainly bonded to silicon.
基金
Project supported by the National Avanced Materials Committee of China(No.715-011-016).
