应用纳米压痕法测试类金刚石薄膜力学性能的研究

Measurement Study on the Mechanical Properties of Diamond-Like Carbon Films Using Nano-Indentation

介绍一种被称为材料机械性质微探针的新型纳米压痕仪 ,藉助于加荷 卸荷过程中压痕对负荷和压入深度 ,即压头位移的敏感关系 ,测试材料的硬度及弹性模量等力学性质。纳米和纳牛顿量级的压头位移与作用力 ,使得测试始终在大多数材料 ,特别是薄膜材料的弹性限度内 ,克服了维氏法、努氏法等传统方法引起压痕边缘模糊或者碎裂的缺点 ,保证了测试的正确性、可靠性和重复性。应用纳米压痕法成功地对具有脆性的类金刚石薄膜的硬度及弹性模量进行了测试和分析。

This paper introduces a new nano indentaton instrument, which is called mechanical properties microprobe of materials. By means of indenter's load and depth (displacement) sensing techniques the mechanical properties such as hardness and elastic modulus can be measured. The order of magnitude in nano meter and nano Newton allows us to test materials, particularly the thin films within the elastic limits of them. That overcomes the shortcomings of vague or crushed indentation's boundary resulted from the traditional measurement methods, e.g. Vicker, Knoop test and so on, therefore that ensures correctness, reliability and reproducibility of the tests. Hardness and modulus of diamond like carbon (DLC) hard films with brittleness are successfully measured and analyzed by the nano indentation instrument.