涂陶型吸气热子残气特性及其质谱分析

Residual Gases Properties and Mass-Spectra of Coat Ceramic Type Ohmic Heating Carrier Getter

采用美国“英福康”公司生产的QUADREX 10 0四极质谱仪对一种全新的涂陶型高牢固吸气热子在真空系统中不同状态下的残余气体分析 ,并与涂Al2 O3型吸气热子进行了同种条件对比测试 ,证明了涂陶型高牢固吸气热子的可实用性。

Used U.S.A 'INFICON' produced QUADREX-100 quadruple mass spectrometer to analyze residual gases for coat ceramic type ohmic heating carrier getter in vacuum system several states, and contrasted with coat Al 2O 3 type ohmic heating carrier getter in the same conditions, demonstrated the practicability of coat ceramic type ohmic heating carrier getter.