KDP晶体超精密加工技术的研究

Study on the Ultra-precision Machining Technology for KDP Crystals

通过对KDP晶体等脆性材料的塑性域切削进行理论分析 ,研究实现脆性材料塑性域切削的条件。激光核聚变KDP晶体的 3项主要技术指标是 :表面粗糙度、波纹度和透射波前 ,通过分析影响这 3项技术指标的因素 ,提出了实现KDP晶体精密加工的超精密机床和工艺参数。通过理论分析与实验 ,研究了晶向、刀具前角、刀具圆弧半径和进给量等参数对表面粗糙度的影响 。

This paper studies on the conditions of ductile regime machining by analyzing the mechanism of brittle-ductile transition for brittle material. The main targets of the KDP crystals in high power lasers are roughness, waveness and transmitted wave front. The ultra-precision machine and process parameters are presented by analyzing the effects on the three main targets. The effect of the parameters such as crystal orientation, top rake angle, tool radius and federate on the roughness is studies through theory analysis and experiments. The optimized machining parameters for KDP crystal are presented at last.