摘要
本装置检定范围(10^(-3)～10~5)Pa,最佳校准能力0.012％～2.2％,可以检定薄膜真空计,热传导真空计以及电离真空计。该装置的建立不仅满足了从大气到10^(-3)Pa高真空计量的需求,而且还可以用来校准标准漏孔,拓宽了检测领域。
The performance of a static expansion vacuum standard is introduced in this paper. Calibration pressure of this apparatus is from 10-3 Pa to 105 Pa. And the total uncertainty caused by random errors is from 0.012% to 2.2%. This standard is used to calibrate capacitance diaphragm gauges, thermal conductivity vacuum gauge and various ion vacuum gauge. The standard also can be used to calibration gaseous reference leaks.
出处
《上海计量测试》
2003年第4期9-11,共3页
Shanghai Measurement and Testing
