从微电子到“活动的硅”——系统集成的未来潜力

From Microelectronics to “Active Silicon” ——Future Potentials of System Integration

本文主要介绍微电子发展趋势、微电子与微机械结合、系统集成的未来潜力。

In the paper, the developing trend of microelectronics, and the microelectronics combined with micro-mechanics, as well as the future potential of system integration are described.