微细加工光学技术的发展

Development of Optical Technologies for Microfabrication

本文简要介绍了微细加工光学技术的发展和“微细加工光学技术国家重点实验室”及其发展目标、研究方向和目前的主要研究领域。

in the paper described are development of optical technologies for microfabrication, 'State Key Labof Optical Technologies for Microfabrication' and its development target, main research directions and researchfields at the present and in the near future.