摘要
用新技术对大直径GaAs晶体生长炉的提拉及旋转系统进行设计,并对系统结构、运动精度进行综合分析。
Apply the new techniques designing the lifting and rotating system for big diameter GaAs crystal growth furnace.The structure and precise of the system is analysed.
出处
《电子工业专用设备》
2003年第4期56-58,共3页
Equipment for Electronic Products Manufacturing
关键词
提拉装置
滚动导轨
变形量
Lift Mechanism
Ball Orbit
Travel Variation
