脉冲钨离子注入导致的空洞效应

Voids induced by pulsed tungsten ion mmplantation

采用由金属蒸汽真空弧(metalvaporvacuumarc,简称MEVVA)离子源引出的强束流脉冲钨离子对H13钢进行了离子注入表面改性研究。在注入剂量为1×1017cm-2,温度为200℃以下,观察到强束流脉冲钨离子注入导致的空洞和空洞的硬化及脆化效应,分析了空洞对注入钨元素浓度深度分布的影响,基于热峰效应(spike),讨论了空洞的形成原因及其与材料耐磨性的关系。

Tungsten ions of a high pulsed current density extracted from a metal vapor vacuum arc (MEVVA) ion source were implanted into H13 steel with an implantation dose of 1×1017cm-2, an extraction acceleration of 30kV, an pulsed ion beam flux of about 0.3mA·cm-2 and 6mA·cm-2.Voids were observed after Tungsten ion implantation at 200℃ by a high voltage (1MV) electron microscope. Experimental results of wear and hardness indicated that the hardness of H13 steel could increase and the wear resistance of H13 steel drop when the voids were produced by a high pulsed current density ion implantation. Forming causes for voids and their influence on the tungsten concentration depth profile in the implanted H13 steel were discussed according to spike theory.