摘要
应用PCVD技术 ,以金属有机物钛酸丙酯 (TPT)代替TiCl4作钛源 ,在H13模具钢表面沉积Ti(CN)涂层 ,研究了不同工艺参数对涂层组织和性能的影响。试验结果表明 ,采用适当的沉积温度、压力及氮气流量 ,可以在H13钢表面得到以Ti(CN)为主的致密涂层 ,显著提高模具的表面硬度和使用寿命。
With the organometallic compound propyl titanate TPT instead of TiCl 4 as the source of Ti,a Ti(CN) layer was deposited on the surface of tool steel H13 by PCVD technique.Effects of the process parameters on the structure and microhardness were investigated.The results show that under a appropriate depositing temperature,pressure and flux of nitrogen,a compact layer mostly consisting of Ti(CN) can be formed on the surface of tool steel,which can enhance the microhardness and improve the service life of tool steel significantly.
出处
《金属热处理》
CAS
CSCD
北大核心
2003年第8期7-9,共3页
Heat Treatment of Metals
