原子力显微镜在纳米粗糙度测量中的应用

Nanometer scale roughness measurements with atomic force microscopes

介绍了用于纳米量级表面粗糙度测量的原子力显微系统。着重讨论了实现这种测量的软件实现方法。实验结果表明 ,该系统可以测量任意横向或纵向截面的线粗糙度 ,同时还可以测量任一区域的面粗糙度 ,并且在 X、Y、Z三个方向上的表面粗糙度测量精度均已达到纳米量级 。

A system of atomic force microscope applied to nanometer scale surface roughness measuring is introduced, and the emphasis is laid on software implementation method. The experiment results show that the system can be well used to measure 1-D surface roughness of a line in random horizontal or vertical direction and the surface roughness of random area. The three dimensional spatial measuring resolution of surface roughness has reached nanometer scale, which will satisfy the need of nanometer scale surface topography research very well.